Optical image measuring apparatus

摘要

A clear image of a measurement target in optical coherence tomography (OCT) is obtained while suppressing influence of reflected light from a specific portion. Included are a laser beam source, a beam splitter that splits a laser beam into a signal beam and reference beam; an objective lens that focuses the signal beam onto a measurement target in a container, a unit that moves the signal beam focus position, an objective lens that focuses the reference beam, a reflecting mirror, a flat plate arranged between the objective lens and reflecting mirror, and interference optics that combine the signal beam reflected by the measurement target with the reference beam reflected by the reflecting mirror and having passed through the objective lens. Three or more interference beams with different phases, and photodetectors that detect the interference beams are generated, and two of the objective lenses are the same lenses.

主权项

1. An optical image measuring apparatus comprising:
a light source configured to emit a laser beam; a beam splitter configured to split the laser beam emitted from the light source into a signal beam and a reference beam; a first objective lens configured to focus the signal beam onto a measurement target to irradiate the measurement target with the signal beam; a focus position moving unit configured to move a focus position of the signal beam; a defocus aberration adjustment unit configured to adjust a defocus aberration of the reference beam; interference optics configured to receive a combined beam which is a combination of the signal beam reflected or scattered by the measurement target and the reference beam, and to generate three or more interference beams with different phases from the combined beam; a plurality of photodetectors configured to detect the interference beams; a processor programmed to generate a plurality of images on the basis of output signals of the photodetectors and apply image processing to the generated images, wherein the processor is further programmed to generate a third image by performing at least a subtraction process between a first image and a second image of the plurality of images, the first image having been generated when not providing the defocus aberration to the reference beam, and the second image having been generated when providing the defocus aberration to the reference beam.