发明名称 |
FLUID ANALYZER AND METHOD OF MANUFACTURING FLUID ANALYZER |
摘要 |
A fluid analyzer includes a substrate, a quantum cascade laser formed on a surface of the substrate and including a first light-emitting surface and a second light-emitting surface facing each other, a first quantum cascade detector formed on the surface and including the same layer structure as the quantum cascade laser and a first light incident surface facing the first light-emitting surface, a second quantum cascade detector formed on the surface and including the same layer structure as the quantum cascade laser and a second light incident surface facing the second light-emitting surface, and a resin member covering at least the second light-emitting surface and the second light incident surface and having optical transparency and an electrical insulation property. A first space in which a fluid to be analyzed is disposed is provided in a first area between the first light-emitting surface and the first light incident surface. |
申请公布号 |
US2017115213(A1) |
申请公布日期 |
2017.04.27 |
申请号 |
US201615294882 |
申请日期 |
2016.10.17 |
申请人 |
HAMAMATSU PHOTONICS K.K. |
发明人 |
ITO Akio;DOUGAKIUCHI Tatsuo;EDAMURA Tadataka |
分类号 |
G01N21/39;H01S5/022;H01S5/12;H01S5/34 |
主分类号 |
G01N21/39 |
代理机构 |
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代理人 |
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主权项 |
1. A fluid analyzer comprising:
a substrate; a quantum cascade laser formed on a surface of the substrate and including a first light-emitting surface and a second light-emitting surface facing each other in a predetermined direction parallel to the surface; a first quantum cascade detector formed on the surface and including the same layer structure as the quantum cascade laser and a first light incident surface facing the first light-emitting surface in the predetermined direction; a second quantum cascade detector formed on the surface and including the same layer structure as the quantum cascade laser and a second light incident surface facing the second light-emitting surface in the predetermined direction; and a resin member covering at least the second light-emitting surface and the second light incident surface and having optical transparency for an oscillation wavelength of the quantum cascade laser, and an electrical insulation property, wherein a first space in which a fluid to be analyzed is disposed is provided in a first area between the first light-emitting surface and the first light incident surface. |
地址 |
Hamamatsu-shi JP |