发明名称 FLUID ANALYZER AND METHOD OF MANUFACTURING FLUID ANALYZER
摘要 A fluid analyzer includes a substrate, a quantum cascade laser formed on a surface of the substrate and including a first light-emitting surface and a second light-emitting surface facing each other, a first quantum cascade detector formed on the surface and including the same layer structure as the quantum cascade laser and a first light incident surface facing the first light-emitting surface, a second quantum cascade detector formed on the surface and including the same layer structure as the quantum cascade laser and a second light incident surface facing the second light-emitting surface, and a resin member covering at least the second light-emitting surface and the second light incident surface and having optical transparency and an electrical insulation property. A first space in which a fluid to be analyzed is disposed is provided in a first area between the first light-emitting surface and the first light incident surface.
申请公布号 US2017115213(A1) 申请公布日期 2017.04.27
申请号 US201615294882 申请日期 2016.10.17
申请人 HAMAMATSU PHOTONICS K.K. 发明人 ITO Akio;DOUGAKIUCHI Tatsuo;EDAMURA Tadataka
分类号 G01N21/39;H01S5/022;H01S5/12;H01S5/34 主分类号 G01N21/39
代理机构 代理人
主权项 1. A fluid analyzer comprising: a substrate; a quantum cascade laser formed on a surface of the substrate and including a first light-emitting surface and a second light-emitting surface facing each other in a predetermined direction parallel to the surface; a first quantum cascade detector formed on the surface and including the same layer structure as the quantum cascade laser and a first light incident surface facing the first light-emitting surface in the predetermined direction; a second quantum cascade detector formed on the surface and including the same layer structure as the quantum cascade laser and a second light incident surface facing the second light-emitting surface in the predetermined direction; and a resin member covering at least the second light-emitting surface and the second light incident surface and having optical transparency for an oscillation wavelength of the quantum cascade laser, and an electrical insulation property, wherein a first space in which a fluid to be analyzed is disposed is provided in a first area between the first light-emitting surface and the first light incident surface.
地址 Hamamatsu-shi JP