发明名称 |
SEMICONDUCTOR DEVICE PRODUCTION COMPOSITION AND PATTERN FORMATION METHOD |
摘要 |
A semiconductor device production composition comprises a product obtained by mixing a metal compound and a compound represented by Formula (1) in a first organic solvent, and a second organic solvent. R and R′ each independently represent a hydrogen atom, a linear or cyclic alkyl group having a carbon number of 2 to 20, a linear or cyclic alkylcarbonyl group having a carbon number of 2 to 20, an aryl group having a carbon number of 6 to 20, or an aryloxy group having a carbon number of 6 to 20, and part of the hydrogen atoms in the cyclic alkyl, cyclic alkylcarbonyl, aryl, or aryloxy group are substituted or unsubstituted.;R—O—O—R′ (1) |
申请公布号 |
US2016349616(A1) |
申请公布日期 |
2016.12.01 |
申请号 |
US201615235471 |
申请日期 |
2016.08.12 |
申请人 |
JSR CORPORATION |
发明人 |
NAKAGAWA Hisashi;Saitou Ryuichi;Kurita Shunsuke;Sakai Tatsuya |
分类号 |
G03F7/11;H01L21/033;G03F7/09 |
主分类号 |
G03F7/11 |
代理机构 |
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代理人 |
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主权项 |
1. A semiconductor device production composition, comprising:
a product obtained by mixing a metal compound and a compound represented by Formula (1) in a first organic solvent; and a second organic solvent:
R—O—O—R′ (1) wherein, in Formula (1), R and R′ each independently represent a hydrogen atom, a linear or cyclic alkyl group having a carbon number of 2 to 20, a linear or cyclic alkylcarbonyl group having a carbon number of 2 to 20, an aryl group having a carbon number of 6 to 20, or an aryloxy group having a carbon number of 6 to 20, and part of the hydrogen atoms in the cyclic alkyl, cyclic alkylcarbonyl, aryl, or aryloxy group are unsubstituted or substituted with substituent groups. |
地址 |
Tokyo JP |