摘要 |
<p>1366125 Cathode-ray tubes RCA CORPORATION 22 Oct 1971 [23 Oct 1970] 49114/71 Heading H1D [Also in Division G2] In an electron beam recorder in which the beam 104 is scanned over a photoresist 10, the latter is mounted in a separate compartment which may be hermetically sealed from the chamber 100 by an electron permeable foil 112, or may, as shown, be in communication with the chamber 100 via an aperture 114. In either case, the two chambers may be maintained at different pressures.</p> |