System for gas distribution and mass flow measurement

摘要

A gas distribution system may include a gas mass flow sensor with a resistive element configured to be heated, a thermally conductive shell surrounding the resistive element and heat-transfer control elements. The shell may include a leading surface oriented substantially orthogonal to a direction of gas flow. The heat-transfer control elements may be positioned to focus heat transfer from the resistive element through the leading surface of the shell so that a rate of heat transfer is independent from the variations in flow configuration.

主权项

1. A gas distribution system, comprising:
a gas mass flow sensor including;
a temperature-sensitive resistive element,a thermally conductive shell surrounding the resistive element, andheat-transfer control elements; wherein the shell includes a leading surface oriented substantially orthogonal to a direction of gas flow; and wherein the heat-transfer control elements are positioned to focus heat transfer from the resistive element through the leading surface of the shell so that a rate of heat transfer is independent from the variations in gas flow configuration.