Radio frequency cathodic deposition diode - has target area on diametral surface of half cylinder in half cylinder screen

摘要

The radio frequency diode forms deposits over a substantial target area or over a large number of small target areas. Substrates to be plated may be single, double or placed back to back. The target area (1) is supported by a half cylinder (2) placed inside a semi-cylindrical cover (3) located on a rectangular frame (4) in which is positioned the substrate. This frame may be rotated about its vertical axis. Electrical connection to the frame and to the single or double target areas, forming in the latter case a complete cylinder, is via a vacuum seal in the diode base. The target area is at least four times as long as it is wide. Cooling water enters and exits the half cylinder (2) via lower channels.