发明名称 Lattice stress compensation in semiconductor monocrystal - grown on insulating crystal by changing compsn. of boundary layer
摘要 <p>A semiconductor monocrystal grown on a crystal of an electrically insulating material is compensated for lattice stresses in the monocrystal, resulting from the difference in the physical properties of the 2 materials. The compensation can be achieved by (a) changing the compsn. of or (b) adding an element to at least one of the crystals at least at the boundary zone between the crystals or (c) mixing at least one of the crystals with the other, so that the difference in the lattice constants between the 2 crystals is reduced. Method is used for Si and other semiconductor monocrystals on spinel, quartz (alpha-SiO2), sapphire (Al2O3), zircon (ZrSiO4), carborundum (alpha-SiC), Be oxide (alpha-Be) etc. and their mixts.</p>
申请公布号 FR2274348(A1) 申请公布日期 1976.01.09
申请号 FR19740020538 申请日期 1974.06.13
申请人 SEMICONDUCTOR RESEARCH FOUNDATIO 发明人
分类号 C30B15/00;H01L21/00;H01L21/20;H01L27/00;(IPC1-7):01J17/00 主分类号 C30B15/00
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