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发明名称
SUITSUCHINGUSOSHI
摘要
申请公布号
JPS5164380(A)
申请公布日期
1976.06.03
申请号
JP19740138173
申请日期
1974.12.02
申请人
HITACHI LTD
发明人
HOSAKA KENICHI;TAKAHOSHI ATSUSHI
分类号
H01L29/74;H01L21/3205;H01L21/60;H01L23/52
主分类号
H01L29/74
代理机构
代理人
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地址
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