| 发明名称 |
METROLOGY SYSTEM, METHOD, AND COMPUTER PROGRAM PRODUCT EMPLOYING AUTOMATIC TRANSITIONING BETWEEN UTILIZING A LIBRARY AND UTILIZING REGRESSION FOR MEASUREMENT PROCESSING |
| 摘要 |
A metrology system, method, and computer program product that employ automatic transitioning between utilizing a library and utilizing regression for measurement processing are provided. In use, it is determined, by the metrology system, that a predetermined condition has been met. In response to determining that the predetermined condition has been met, the metrology system automatically transitions between utilizing a library and utilizing regression for measurement processing. |
| 申请公布号 |
US2016320315(A1) |
申请公布日期 |
2016.11.03 |
| 申请号 |
US201514826079 |
申请日期 |
2015.08.13 |
| 申请人 |
KLA-Tencor Corporation |
发明人 |
Lee Liequan;Getin Raphael Jean Michel Marie;Cao Meng;Poslavsky Leonid;Kaack Torsten Rudolf;Qiu Hong |
| 分类号 |
G01N21/95;G01B11/02 |
主分类号 |
G01N21/95 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method, comprising:
determining, by a metrology system, that a predetermined condition has been met; and in response to determining that the predetermined condition has been met, automatically transitioning, by the metrology system, between utilizing a library and utilizing regression for measurement processing. |
| 地址 |
Milpitas CA US |
