| 摘要 |
In a device for rectilinearly guiding a stage carrying thereon a sample, a stationary race is integrally formed with a stationary member and has at least two surfaces forming a certain angle with each other. A movable race is provided and movable with the stage in a predetermined direction with respect to the stationary member, and has at least two surfaces opposed to the surfaces of the stationary race, respectively. A drive assembly is provided for driving the stage-moving movable race. Stage-moving sliders comprising a plurality of roll bearings and base plates supporting the bearings are disposed between the opposed surfaces of the stationary race and the stage-moving movable race. Pressing elements are provided for causing the opposed surfaces of the stationary race and the movable race to impart pressure forces to the roll bearings simultaneously.
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