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发明名称
PATAANKEISEIYOMASUKUKIBAN
摘要
申请公布号
JPS5192178(A)
申请公布日期
1976.08.12
申请号
JP19750017693
申请日期
1975.02.10
申请人
发明人
分类号
H01L21/027;H01L21/302;H05K3/00
主分类号
H01L21/027
代理机构
代理人
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地址
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