| 发明名称 |
DIFFRACTION PATTERN DETECTOR |
| 摘要 |
PURPOSE:In the pattern detector to inspect the pattern form using the diffraction light of laser, detect the shift of the O-dimension diffraction light at the end of the element by oblique incidence of laser and detect the place of the irradiation and the pattern form at the same time. |
| 申请公布号 |
JPS51112183(A) |
申请公布日期 |
1976.10.04 |
| 申请号 |
JP19740092528 |
申请日期 |
1974.08.12 |
| 申请人 |
MITSUBISHI ELECTRIC CORP |
发明人 |
INANI TAKAHIKO;KAMEI MITSUHITO |
| 分类号 |
G01R31/26;G01B9/00;G01B11/24;G01B11/30;G01N21/88;G01N21/956;G02F1/136;H01L21/027;H01L21/66 |
主分类号 |
G01R31/26 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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