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发明名称
ARTICLE TREATMENT APPARATUS
摘要
申请公布号
GB1474007(A)
申请公布日期
1977.05.18
申请号
GB19750011465
申请日期
1975.03.19
申请人
ALLIED CHEM CORP
发明人
分类号
H05K3/06;B05B15/12;C23F1/08;H01L21/306;(IPC1-7):B44C1/22
主分类号
H05K3/06
代理机构
代理人
主权项
地址
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