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经营范围
发明名称
HEAT TREATMENT FURNACE
摘要
申请公布号
JPS5267575(A)
申请公布日期
1977.06.04
申请号
JP19750142988
申请日期
1975.12.03
申请人
HITACHI LTD
发明人
YASUFUKU KOUJI;AKIYAMA HIROSHI;SHIOKAWA KAZUO
分类号
H05B3/62;F27B3/08;F27D11/02;H01L21/22
主分类号
H05B3/62
代理机构
代理人
主权项
地址
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