| 发明名称 |
THROUCHHHOLE FORMATION METHOD |
| 摘要 |
PURPOSE:To form through-hole with no pinhole to the object to be formed by performing photo etching twice with use of two photo masks containing same pattern. |
| 申请公布号 |
JPS5267988(A) |
申请公布日期 |
1977.06.06 |
| 申请号 |
JP19750144879 |
申请日期 |
1975.12.04 |
| 申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
TOMIOKA TATSUYUKI;YUIGAMI NOBORU;YAMASHITA KIYOHARU;HATSUTORI KOUDOU |
| 分类号 |
H05K3/46;H01L21/302;H01L21/306;H01L21/3213;H05K3/00 |
主分类号 |
H05K3/46 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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