IRRADIATION APPARATUS HAVING RADIATION UNIT

摘要

An irradiation apparatus includes a radiation unit for the emission of radiation in the form of a beam, a first microlens arrangement, downstream of the radiation unit, having a multiplicity of convergent microlenses, for dividing the beam into one partial beam per convergent microlens, and a convergent lens, downstream of the microlens arrangement, that overlays the partial beams, in an irradiated area. The microlenses have a first group and a second group. The microlenses in each group are identical, but the microlenses in the first group differ from the microlenses in the second group from their shape, size and/or focal length, so that a first region of the irradiated area, which is irradiated via the microlenses in the first group, differs from a second region of the irradiated area, which is irradiated by the microlenses in the second group, from its shape and/or its size.

主权项

1. An irradiation apparatus, comprising:
a radiation unit for the emission of radiation in the form of a beam in the time integral; a first microlens arrangement, downstream of the radiation unit, having a multiplicity of convergent microlenses, arranged next to one another in relation to the direction of radiation propagation, for dividing the beam into one partial beam per convergent microlens; and a convergent lens, downstream of the microlens arrangement, that overlays the partial beams, at least in the time integral, in an irradiated area; which convergent microlenses break down into at least a first group and a second group having a respective plurality of convergent microlenses, wherein the convergent microlenses in each group are identical, but the convergent microlenses in the first group differ from the convergent microlenses in the second group in at least one from their shape, size and focal length, so that a first region of the irradiated area, which region is irradiated via the convergent microlenses in the first group, differs from a second region of the irradiated area, which region is irradiated by the convergent microlenses in the second group, in at least one from its shape and its size.