发明名称 FILAMENT EXCHANGING METHOD FOR VACUUM EVAPORATION APPARATUS
摘要 PURPOSE:To prevent shortening of life of filament due to incomplete contact by loading another support with a filament, while evaporation is carried out, at outside of evaporation apparatus and independently of operation schedule.
申请公布号 JPS5330991(A) 申请公布日期 1978.03.23
申请号 JP19760104972 申请日期 1976.09.03
申请人 ULVAC CORP 发明人 HAYASHI CHIKARA
分类号 C23C14/26 主分类号 C23C14/26
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