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发明名称
INSPECTING METHOD OF FILM DEFECTS
摘要
申请公布号
JPS5376881(A)
申请公布日期
1978.07.07
申请号
JP19760151899
申请日期
1976.12.20
申请人
FUJITSU LTD
发明人
TANAKA AKIRA;YAMAGUCHI YUKIAKI;KODAMA MICHIKO
分类号
G01N33/20;G01N33/00
主分类号
G01N33/20
代理机构
代理人
主权项
地址
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