| 发明名称 |
SOFT XXRAY COPY MASK AND ITS MANUFACTURE |
| 摘要 |
<p>PURPOSE:To increase the accuracy of clearance in copying pattern, by providing a plural number of projections of Si monocrystal playing a role of spacer and the mask pattern consisting of the material absorbing soft X-ray on the one jajor surface of Si thin film held with the support frame.</p> |
| 申请公布号 |
JPS5398780(A) |
申请公布日期 |
1978.08.29 |
| 申请号 |
JP19770012982 |
申请日期 |
1977.02.10 |
| 申请人 |
HITACHI LTD;NIPPON TELEGRAPH & TELEPHONE |
发明人 |
TAKEMOTO KAYAO;MIYAZAKI MASARU;NAKAYAMA SATORU;MATSUO SEITAROU |
| 分类号 |
H01L21/027;H01L21/302 |
主分类号 |
H01L21/027 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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