IN-PLANE OVERTRAVEL STOPS FOR MEMS MICROPHONE

摘要

A MEMS microphone including a plurality of overtravel stops (OTS) connected to a perimeter of a membrane of the MEMS microphone. The OTS are released from a backplate layer during manufacturing and are configured to contact the backplate to restrict movement of the OTS and thus restrict movement of the membrane of the MEMS microphone. Embodiments of the invention provide, in particular, an overtravel stop that limits movement of the membrane in a radial direction.

主权项

1. A microelectricalmechanical (MEMS) microphone comprising:
a first layer including
a membrane;a spring having a first end coupled to the membrane; and a second end coupled to a support; a second layer including
a backplate connected to the support; andan overtravel stop released from the backplate such that the overtravel stop is physically separated from the backplate, the overtravel stop being configured to restrict a range of movement of the membrane in multiple directions by contacting the backplate.