| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitance type gas sensor that has excellent detection sensitivity for gas and response characteristics, can be made small in size and is easily mounted as an electronic component, and a fabrication method of the above sensor.SOLUTION: The capacitance type gas sensor includes, on a substrate 12, a first electrode layer 14, a sensitive film 16 covering the first electrode layer 14, and a second electrode layer 18 on a surface of the sensitive film 16 to oppose to the first electrode layer 14, in which the second electrode layer 18 is made of a nanocarbon material entangled to form a mesh. The sensitive film 16 is made of a polyimide-based photosensitive resin. The second electrode layer 18 is integrally formed with the sensitive film 16, which thereby has excellent weather resistance. Thus the capacitance type gas sensor has high sensitivity and excellent response characteristics.SELECTED DRAWING: Figure 1 |
