Remote plasma source for controlling plasma skew

摘要

A plasma source is provided including a core element extending from a first end to a second end along a first axis. The plasma source further includes one or more coils disposed around respective one or more first portions of the core element. The plasma source further includes a plasma block having one or more interior walls at least partially enclosing an annular plasma-generating volume that is disposed around a second portion of the core element. The annular plasma-generating volume includes a first region that is symmetrical about a plurality of perpendicular axes that are perpendicular to a first point positioned on the first axis, the first region having a width in a direction parallel to the first axis and a depth in a direction perpendicular from the first axis. The first region has a width that is at least three times greater than the depth of the first region.

主权项

1. A plasma source coupled to a process chamber, the plasma source comprising:
a core element extending from a first end to a second end along a first axis; one or more coils disposed around respective one or more first portions of the core element; and a plasma block having one or more interior walls at least partially enclosing an annular plasma-generating volume that is disposed around a second portion of the core element, the annular plasma-generating volume comprising:
a first region that is symmetrical about a plurality of perpendicular axes that are perpendicular to the first axis at a first point positioned along the first axis, the first region having:
a width in a direction parallel to the first axis and a depth in a direction perpendicular from the first axis, wherein the width in the first region increases as the depth from the first point positioned on the first axis increases;a central point located at an intersection of one of the perpendicular axes and an interior wall, wherein the central point is a first depth from the first point positioned on the first axis;a first width between a first location and a second location on one or more of the interior walls, wherein the first width is parallel to the first axis and the first width is a second depth from the first point positioned on the first axis; anda third depth spanning a distance between the second depth and the first depth, wherein the first width is at least three times greater than the third depth.