发明名称 |
High-resolution, cryogenic, side-entry type specimen stage |
摘要 |
A high-resolution, cryogenic side-entry type specimen stage includes a copper block within which a specimen can be positioned in the electron beam of an electron microscope, one end of the copper block constituting a specimen heat exchanger, means for directing a flow of helium at cryogenic temperature into the heat exchanger, and electrical leads running from the specimen to the exterior of the microscope for four point D.C. electrical resistivity measurements.
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申请公布号 |
US4162401(A) |
申请公布日期 |
1979.07.24 |
申请号 |
US19780906816 |
申请日期 |
1978.05.17 |
申请人 |
U S OF AMERICA ENERGY DEPARTMENT |
发明人 |
KING, WAYNE E;MERKLE, KARL L |
分类号 |
H01J37/20;(IPC1-7):G01N23/00 |
主分类号 |
H01J37/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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