发明名称 ELECTROOPTICAL DEVICE, METHOD FOR MANUFACTURING THE ELECTROOPTICAL DEVICE, AND ELECTRONIC APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide an electrooptical device capable of forming a mirror without leaving a sacrificial layer in a mirror supporting part (in a mirror post) for supporting the mirror, a method for manufacturing the electrooptical device, and an electronic apparatus.SOLUTION: An electrooptical device 100 includes a torsion hinge 35 provided with a first opening part 351. The torsion hinge 35 is in contact with a first contact part 411 of a cylindrical mirror supporting part 41, from a side opposite to a substrate 1 side, in the periphery of the first opening part 351. No resin composing a sacrificial layer is left inside the mirror supporting part 41. A second end 418 of the mirror supporting part 41 on a side opposite to the substrate 1 becomes a flat plate part 416, and is in contact with the mirror 51. Therefore, no hollow is generated on the mirror 51.SELECTED DRAWING: Figure 4
申请公布号 JP2016194632(A) 申请公布日期 2016.11.17
申请号 JP20150074870 申请日期 2015.04.01
申请人 SEIKO EPSON CORP 发明人 ITO SATOSHI
分类号 G02B26/02;B81B3/00;B81C1/00 主分类号 G02B26/02
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