| 摘要 |
PURPOSE:To improve the irradiating position accuracy while reducing the cost of of the equipment by driving a plurality of laser oscillators by means of one set of charging power source and charging/discharging circuit. CONSTITUTION:A DC high voltage power source 10 for charging is connected to a charging/discharging circuit 20 comprising a capacitor 21, an inductor 22 and a resistance 23 and further to a trigger pulse generating circuit 30 incorporating trigger transformers 31-33. Then, a laser oscillator heads 41-43 respectively having laser rod exciting lamps 411-431 are connected to the transformers 31-33 to actuate the heads in sequence. In operation, trigger pulses are fed to the lamps 411-431 with the transformers in a given sequence to individually drive the heads 41-43. In this manner, the irradiating position accuracy can be improved at a low cost. |
