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发明名称
METHOD OF JUDGING WHETHER SILICON WAFER IS GOOD OR NOT
摘要
申请公布号
JPS5568647(A)
申请公布日期
1980.05.23
申请号
JP19780141495
申请日期
1978.11.16
申请人
FUJITSU LTD
发明人
IIDA ATSUO
分类号
G01N27/00;H01L21/66
主分类号
G01N27/00
代理机构
代理人
主权项
地址
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