| 摘要 |
PURPOSE:To decrease extremely the heat capacity and thus enhance both the sensitivity and the responsiveness by using several support bars featuring the extremely small cross-section to support the substrate with the infrared ray absorber provided on the main surface. CONSTITUTION:Warm contact 5a of thermocouple or radiation thermocouple 5 is provided on the back of substrate 2 with infrared ray absorber 1 provided on the main surface, and cold contact 5b is provided to holder 3 of substrate 2 via insulating film 6. At the same time, several units of support bar 4 the cross-section of which is extremely small to substrate 2 are provided to support substrate 2. As a result, the transmission of the heat energy of absorber 1 can be reduced extremely from bar 4 to holder 3, and thus no reduction is caused substantially for the sensitivity. Thus absorber 1 can hold a constant output voltage level although it recevies irradiation for a long period of time. Furthermore, the excellent responsiveness is secured since the heat capacity is extremely small for substrate 2, holder 3 and bar 4 each. |
