发明名称 ELECTRON BEAM EXPOSING DEVICE
摘要 PURPOSE:To improve an efficiency of operation by a method wherein a temperature detector and an electronic temperature adjuster element are arranged on a table block, and a temperature of the table block is adjusted to a desired value in a short period of time. CONSTITUTION:Temperature of the table block 13 is sensed by a thermocouple 22 and always compared with a desired temperature set by a temperature setting means 24. Either a positive or a negative voltage is applied to an electronic temperature adjustor 21 from the temperature adjuster 23 so as to make difference zero, the electronic adjustor element is operated as a heater or a cooler and the table block 13 is kept at a desired temperature. With this arrangement, the treated material 12 on the table block 13 is heated through a thermal condition from the table block 13, rapidly increased to reach to the desired temperature in a short period of time and stabled. Thus, a working efficiency may be improved more.
申请公布号 JPS5683937(A) 申请公布日期 1981.07.08
申请号 JP19790161032 申请日期 1979.12.12
申请人 FUJITSU LTD 发明人 FURUYA SHIGERU;YAMAMOTO SUMIO;TAGUCHI AKIRA;YAMASHITA YOSHIMI
分类号 H01L21/027;H01J37/02;(IPC1-7):01L21/30 主分类号 H01L21/027
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