| 摘要 |
PURPOSE:To simplify putting in and taking out of water by a method wherein in a jig for performing diffusion or oxidation treatment to silicon wafer and the like, a part of a parallel supporting rack connecting with wafer is not provided with grooves and leaving it longitudinally in a smooth state. CONSTITUTION:When making a jig for treatment supporting many sheets of silicon wafer using quartz glas, silicon, silicon carbide and such, the opposing supporting racks 1 and 2 are used to form it in the frame shape. The racks 1 and 2 are provided with grooves cut-in respectively at intervals, a part of the periphery of wafer is put therein to keep wafer standing. In this constitution, the rack 1 or 2 is provided with at least one spot having no groove and this spot is left longitudinally in a smooth state. In this way the wafer can be easily put in and taken out wihtout causing any defect or crack in the pheripheral part of wafer. |
