发明名称 INTERFEROMETRIC ELLIPSOMETRY AND METHOD USING CONICAL REFRACTION
摘要 An apparatus and method for determining optical properties of an object (50) includes a light source (10) and an optical system for illuminating at least one point of the object with light from the light source, and collecting light reflected from the object. A biaxial birefringent crystal (30) intercepts a beam of light reflected from the object and propagates the beam along an optical axis of the crystal and transforms the beam of reflected light to a ring of light having a periphery, each point of which has a different polarization plane. A detector array (40) detects respective points along the periphery of the ring and a processing unit (45) is coupled to the detector and is responsive to signals thereby for determining optical properties of the object.
申请公布号 EP3097401(A1) 申请公布日期 2016.11.30
申请号 EP20150707429 申请日期 2015.01.22
申请人 ADOM ADVANCED OPTICAL TECHNOLOGIES LTD. 发明人 ARIELI, YOEL;COHEN, YOEL
分类号 G01N21/21 主分类号 G01N21/21
代理机构 代理人
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