| 摘要 |
PURPOSE:To remove foreign matters adhered on the other surface of the substrate effectively without changing the original plane shape of the substrate by using a flexible sheet-shaped grindstone and inclining the shaft to the shaft of a work holding base. CONSTITUTION:A layer 2, on which materials of different kinds attach, of the substrate 1 is absorbed to a disk 14 by means of holes 16 through a polyurethane rubber 15, and the disk is mounted onto a receiving disk 12 of a hollow shaft 11 through an O ring. The grindstone 18 is used which is manufactured by mounting a grain layer 20 on an outer circumference of a flexible thin metallic disk 19 attached at a nose of the shaft 17, while the shaft 17 is inclined to the shaft 11, the grain layer 20 is pushed onto the foregin matters attached part 3 of the fringe of the back A of the substrate 1. The gaindstone 18 is turned, a working liquid is fed from a nozzle 21, the foregin matter attached part 3 is removed, while the grindstone is moved in the arrow direction in parallel with the surface of the revolution receiving disk 12, and the grindstone 18 is separated when the grindsone reaches the center of the substrate 1. According to this constitution, even when the surface of the substrate 1 is vibrated, the grindstone 18 follows up, and the foregin matters having moved to another surface can be removed effectively without changing the plane shape of the original substrate. |
