摘要 |
PURPOSE:To facilitate discharge starting by a method wherein a starting electrode is arranged in a hollow cathode and a high voltage is applied across the starting electrode and the hollow cathode at the time of discharge starting to generate a discharge. CONSTITUTION:The end portion of a hollow cathode 1 on the anode 2 side is supplied with an end portion with an orifice 5a, while a plate type starting electrode 11 is arranged in the hollow cathode 1. A starting electrode 11 is connected to the starting electrode 11 and the hollow cathode 1 via switch 12. At the time of discharge starting, the switch 12 is turned on to apply a high voltage across the hollow cathode 1 and the starting electrode 11. Then discharge is initiated between electrodes 1, 11 and plasm with high density is produced and the inside wall of the hollow cathode 1 is sufficiently heated. By so doing, a hollow cathode are discharge between the hollow cathode and the anode is readily started. |