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发明名称
CONFORMAL DEPOSITION OF SILICON CARBIDE FILMS
摘要
申请公布号
SG10201600832V(A)
申请公布日期
2016.09.29
申请号
SG10201600832V
申请日期
2016.02.03
申请人
NOVELLUS SYSTEMS, INC.
发明人
VARADARAJAN, BHADRI N.;GONG, BO;GUI, ZHE
分类号
主分类号
代理机构
代理人
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