| 摘要 |
PURPOSE:To detect signal charge by a floating electrode by applying a DC voltage to the 1st electrode and a pulse voltage, different from a pulse voltage applied to a transfer electrode, to the 2nd electrode. CONSTITUTION:Signal charge is electrostatic capacity relating to a floating electrode 44 and read out through an amplifier 50. At this time, the floating electrode 44 is shielded by the 2nd electrode 43 from a transfer electrode 42 in terms of alternating current, and has no potential variation due to electrostatic coupling with the transfer electrode 42, and this potential variation of the electrode 44 depends upon only the signal charge, reducing the distortion of an output signal. Then, the signal charge right under the floating electrode 44 all moves to right under electrodes 45 and 46 and is then accumulated only right under an electrode 46, thus forming a barrier which prevents the reverse flow of the signal charge because the electrode 45 is at a low potential. |
