| 摘要 |
PURPOSE:To make gas exchanging quick and detect oxygen concn. with good accuracy by setting the thickness of an oxygen ion conductive solid electrolyte at <=4mu, and performing gas exchanging quickly in response to the change in an atmosphere to be measured. CONSTITUTION:A laminated type oxygen sensor element consists of the construction wherein a heating element 12 is buried in a diaphragm layer 11 holding intensity as a structural base body, an intermediate treating layer 13 is formed on one side suface thereof, the surface roughness of the layer 11 is set at <=0.25mu, and further a reference electrode 14 is formed thereon at <=1mu thickness, an oxygen ion conductive solid electrolyte 15 at <=4mu thickness, and a measuring electrode 16 at <=1mu thickness successively, and a protective layer 17 is coated over the entire surface. Then, gas exchanging is accomplished quickly in the solid electrolyte, whereby the response speed of the oxygen sensor element is made extermely fast and the detection of the oxygen concn. in an atmosphere to be measured is accomplished with good accuracy. |
