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经营范围
发明名称
CENTRIFUGAL WAFER PROCESSOR.
摘要
申请公布号
EP0047308(A4)
申请公布日期
1982.07.13
申请号
EP19810900893
申请日期
1981.02.27
申请人
THOMPSON, RAYMON F.
发明人
THOMPSON, RAYMON F.
分类号
B08B3/04;B08B3/02;H01L21/304;H01L21/306;(IPC1-7):B08B3/02
主分类号
B08B3/04
代理机构
代理人
主权项
地址
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