发明名称 CHEMICAL FILTER
摘要 PROBLEM TO BE SOLVED: To provide a chemical filter for silanol compound removal capable of removing efficiently a silanol compound in a fluid.SOLUTION: A chemical filter for silanol compound removal uses as an absorbent, an inorganic silica-based porous material in which pH of mixed liquid (content ratio: 5 wt%) when being mixed with pure water is 7 or lower.SELECTED DRAWING: None
申请公布号 JP2016179461(A) 申请公布日期 2016.10.13
申请号 JP20150062473 申请日期 2015.03.25
申请人 NITTA IND CORP 发明人 SHIGETA MAKOTO;IRIE YUTA
分类号 B01D53/04;B01J20/02;B01J20/10;B01J20/12;B01J20/14;B01J20/16;B01J20/18;B01J20/28;G03F7/20;G03F7/30;H01L21/02;H01L21/027 主分类号 B01D53/04
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