| 摘要 |
PURPOSE:To introduce a highly pure gas into a lamp by conducting introduction of the gas to be sealed in the lamp at a movable manifold. CONSTITUTION:A lamp is connected to an exhaust port 1, then a vacuum valve 8 is opened and the lamp is exhausted with a vacuum pump until a predetermined degree of vacuum is obtained. Next, when the predetermined degree of vacuum is obtained, the vacuum valve 8 is closed and a gas feed valve 10 is opened, then the gas is introduced into the lamp from a gas bottle 12 through a reducing valve 11 and a flow adjusting valve 13. Accordingly, the sealed gas does not go through an oil film 6, and the oil for sealing will not penetrate into the lamp together with the gas. The vacuum valve 8 can be provided at a fixed manifold side 7, instead of being provided between a gas feed pipe 9 junction of a movable monifold 9 and a movable plate 2. |
