发明名称 |
Enclosure and method for handling electron gun or ion gun |
摘要 |
The present invention is a charged-particle gun (EG) in which a negative electrode (1) and a positive electrode (9) are integrated and assembled in advance, and which can be stored and transported in a state in which the negative electrode and the positive electrode are integrated, wherein the negative electrode and the positive electrode are connected by a conductor (11) during storage and transportation of the charged-particle gun. It is thereby possible to prevent an electrode tip of the charged-particle gun from being damaged by electrical discharge caused by static electricity during storage and transportation. |
申请公布号 |
IL228286(A) |
申请公布日期 |
2016.10.31 |
申请号 |
IL20130228286 |
申请日期 |
2013.09.03 |
申请人 |
TOSHIYUKI MORISHITA;DENKI KAGAKU KOGYO KABUSHIKI KAISHA;YOSHINORI TERUI |
发明人 |
TOSHIYUKI MORISHITA;YOSHINORI TERUI |
分类号 |
H01J |
主分类号 |
H01J |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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