发明名称 Enclosure and method for handling electron gun or ion gun
摘要 The present invention is a charged-particle gun (EG) in which a negative electrode (1) and a positive electrode (9) are integrated and assembled in advance, and which can be stored and transported in a state in which the negative electrode and the positive electrode are integrated, wherein the negative electrode and the positive electrode are connected by a conductor (11) during storage and transportation of the charged-particle gun. It is thereby possible to prevent an electrode tip of the charged-particle gun from being damaged by electrical discharge caused by static electricity during storage and transportation.
申请公布号 IL228286(A) 申请公布日期 2016.10.31
申请号 IL20130228286 申请日期 2013.09.03
申请人 TOSHIYUKI MORISHITA;DENKI KAGAKU KOGYO KABUSHIKI KAISHA;YOSHINORI TERUI 发明人 TOSHIYUKI MORISHITA;YOSHINORI TERUI
分类号 H01J 主分类号 H01J
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