Method of controlling a patterning device in a lithographic apparatus, device manufacturing method and lithographic apparatus

摘要

A system for controlling a patterning device in a lithographic apparatus using a patterning device having individually controllable elements that may only be set to two states. The method includes converting a representation of a pattern to be formed on the substrate into a plurality of area intensity signals, each corresponding to a radiation intensity level required to be set in a respective area of the patterning device in order to provide the desired pattern on the substrate and a separate step of converting each of the area intensity signals into control signals for a plurality of individually controllable elements that each correspond to the area of the patterning device.

主权项

1. A method comprising:
converting a representation of a pattern desired to be formed on a substrate into a plurality of area intensity signals, each corresponding to a radiation intensity level to be set in a respective area of a patterning device in a lithographic apparatus such that the effect at the substrate of the respective radiation intensity levels being set in each area of the patterning device is the desired pattern, the patterning device comprising a plurality of individually controllable elements that each may be set to either a first state, in which radiation is directed to a corresponding portion of the substrate, or a second state, in which radiation is not directed to a corresponding portion of the substrate; converting each of the area intensity signals into a plurality of control signals for a respective plurality of individually controllable elements corresponding to the area of the patterning device such-that the individually controllable elements are set to appropriate states in order that the combined effect of setting all of the individually controllable elements in the area to the states in use is to provide the radiation intensity level for the area specified in the area intensity signal; and setting each of the individually controllable elements according to its associated control signal.