| 摘要 |
PURPOSE:To simply perform a drive system required for two-dimensional movements by integrating independent two moving elements of a linear motor and disposing yokes in parallel with each other. CONSTITUTION:First and second yokes 11, 12 are coaxially disposed at their magnetic flux loops, and are disposed at the prescribed interval in parallel with eath other. Moving elements 13 are provided oppositely to the yokes 11, 12. The elements 13 can not only be moved along the longitudinal direction of the yokes by varying the quantity of magnetic flux applied to the yokes 11, 12, but an ultrafine movement can be performed in opposite directions of the yokes 11, 12. |
