| 摘要 |
PURPOSE:To provide a device which has high safety and reliability, by a method wherein, in case a medium, capsulated at the inside, is brought to a state that it can freely move, a protection mechanism against an excessive pressure is actuated by a pressure diaphragm to prevent the movement of the medium. CONSTITUTION:If a pressure Pa is supplied, a bellows moves leftward through the working of a diaphragm 40a and a pressure transmission medium 43a, and a support shaft 53 and a regulating valve 54a move to the left following the movement of the bellows to bring an O-ring 56a of the valve 54a into contact with a projection 57a. This stops the movement of the bellows and the support shaft 53, and simultaneously the pressure medium 43a is sealed between the diaphragm 40a and the valve 54a, and between the valve 54a, an element 37, or the bellows and an auxiliary elastic substance 38. Thus, the medium 43a stops moving, and a further excessive pressure is prevented from being supplied to the element 37. |
