SURFACE PROCESSING APPARATUS UTILIZING MICROWAVE PLASMA,申请号GB19800036336-传众专利搜索

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发明名称	SURFACE PROCESSING APPARATUS UTILIZING MICROWAVE PLASMA
摘要
申请公布号	GB2064279(B)	申请公布日期	1983.04.07
申请号	GB19800036336	申请日期	1980.11.12
申请人	TOKYO SHIBAURA DENKI KK	发明人
分类号	B01J19/08;C23C8/36;C23C16/50;H05H1/46;(IPC1-7):H05H1/46	主分类号	B01J19/08
代理机构		代理人
主权项
地址

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