| 摘要 |
PURPOSE:To improve coercive force of a magnetic recording media and reduce an used gaseous flow rate, by vapor-depositing a magnetic vapor-deposited substance such as a magnetic metal on a nonmagnetic substrate in the atmosphere in which partial voltage of gaseous ozone is larger than the partial voltages of other gas. CONSTITUTION:The inside pressure of a vacuum tank 1 is made about <=1X 10<-3>Torr, and a nonmagnetic substrate 2 such as polyethylene terephthalate film is arranged as to be reeled to a reeling roller 5 through a guide roller 4 from a roller 3, and the mixed gas whose O3 density is larger than O2 density is supplied from an ozone generator A, and metals such as Co, Ni and Fe or these alloys in a heating means 7 at the lower part in the tank 1 are evaporated. A masking part 8 is provided and the mixed gas is blown off so that incident angles are made small in the area having a large vapor deposition ratio and are made large in the area having a small vapor deposition ratio, while O2 contg. O3 becomes more in the area having a large vapor deposition ratio to form a magnetic layer having heightened coercive force. By this way, the coercive force is remarkably improved with the amount of gas which is less than the amount in the case of O2 only. |
