发明名称 METHOD FOR PROCESSING SIGNAL FOR PATTERN EDGE DETECTION AND SIGNAL PROCESSING DEVICE
摘要 PURPOSE:To increase the signal intensity of a differential waveform more than that in a conventional method, by improving the shape and vibrating method of a vibrating mirror. CONSTITUTION:The vibrating mirror 5 has a configuration wherein two mirrors are combined so that a constant angle alpha (corresponding to a rotary angle in the conventional method) is provided views from the direction perpendicular to a beam (perpendicular to the paper). The mirror 5 is vibrated in the direction perpendicular to the paper at a constant vibration number omega. Then, the modulating component becomes a rectangular wave having a vibrating frequency omega and an amplitude (a), instead of a modulating signal (a sin omegat) in the conventional method as shown by a signal 12. Therefore said crossing curves becomes the shape shown by a curve 13. When the intensities of the differential waves are compared, the intensity of this method is pi/2 times that of the conventional method, at the part where the intensity distribution curve 7 of the primary signal is linear. The intensity of the differential wave of this method is always larger at any part of the curve 7.
申请公布号 JPS58155306(A) 申请公布日期 1983.09.16
申请号 JP19820039728 申请日期 1982.03.12
申请人 MATSUSHITA DENSHI KOGYO KK 发明人 NIIKE TAKUMI
分类号 G01B11/00;G01B11/02 主分类号 G01B11/00
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