| 摘要 |
PURPOSE:To obtain a sensor having excellent corrosion resistance characteristics, by forming a base seat, which connects a semiconductor pressure sensitive diaphragm and a pressure conducting pipe, by zircon. CONSTITUTION:For example, a semiconductor pressure sensitive diaphragm chip 1 comprising silicon is fixed to a base seat 21 comprising a sintered body of zircon (ZrO2.SiO2) by a bonding layer 13. For example, a pressure conducting pipe 3 comprising Kovar is fixed to the seat 21 by the bonding layer 13. The pressure conducting pipe 3 is fixed to a bottom plate 5 of a container by a ring shaped supporting body 4, which forms a part of the container. |
