发明名称 MANUFACTURE OF ROTOR FOR TURBO MOLECULAR AIR PUMP
摘要 PURPOSE:To improve the performance, efficiency and corrosion resistance of a pump, by laminating Ti alloy vane plates and Ti alloy rotor rings alternately and forming the same by diffusion bonding to one body. CONSTITUTION:Insert materials 2 are inserted between vane plates 1 and rotor rings 3 of the same material (Ti-6Al-4V alloy) as the plates 1. The assembly thereof is installed in a vacuum chamber and is heated therein after the inside of the chamber is evacuated. The assembly is pressurized from the axial direction whle it is kept at a high vacuum and high temp., and the plates 1 are diffusion-bonded to the rotor rings 3 while both are held in the equal temp. and pressurized state for a required time. If the high titanium material (Ti-6Al-4V) is used for the plates 1 and the rings 3 as mentioned above, the rotor has the specific strength higher by about >=2 times than the strength of conventional Al alloy rotors and since the rotor is highly resistant to corrosion, the performance of the pump is improved.
申请公布号 JPS591076(A) 申请公布日期 1984.01.06
申请号 JP19820108424 申请日期 1982.06.25
申请人 HITACHI SEISAKUSHO KK 发明人 KOUNO AKIOMI;NAKAE HIDEO;YAMAMOTO AKIHIKO;UEDA SHINJIROU;SUGIYAMA TSUNEO
分类号 F04D19/04;B23K1/00;B23K20/00;F04D29/32 主分类号 F04D19/04
代理机构 代理人
主权项
地址