| 摘要 |
An ultrasonic sensor (91) for use in an ultrasonic micro spectrometer includes a concave surface transducer (10a) having a concave ultrasonic wave transmitting/receiving surface and a plane transducer (10b) having a plane transmitting/receiving surface. The concave surface transducer (10a) is capable of transmitting converging ultrasonic waves toward a specimen, wherein the waves are reflected from the surface of the specimen and are received by the plane transducer (10b) which outputs electric signals corresponding to the intensity of the reflected ultrasonic waves. Based on a signal output from the ultrasonic sensor (91), a spectroanalyzer (15a) forms a distribution of spectral intensity indicating the intensity of the reflected wave as a function of frequency. A tracking generator (15b) further forms a distribution of spectral phase indicating the spectral phase of the reflected waves as a function of frequency. Either the distribution of spectral intensity or of spectral phase can effectively be analyzed for evaluating elastic characteristics and structure of a specimen. <IMAGE> |
