ELECTRO-OPTICAL DEVICE, METHOD OF MANUFACTURING ELECTRO-OPTICAL DEVICE, AND ELECTRONIC APPARATUS

摘要

An electro-optical device is configured by a laminated body of a second conductive layer and a reflective layer for a mirror. The second conductive layer includes a mirror support post facing a concave portion at a side opposite to a substrate, and a flat plate which extends from an end portion of the mirror support post and faces the substrate. The concave portion is filled with the resin. Surfaces of the flat plate and the resin configure a continuous plane. The reflective layer for a mirror is laminated on a surface of the resin at a side opposite to the substrate, and a surface of the flat plate of the second conductive layer at a side opposite to the substrate.

主权项

1. An electro-optical device comprising:
a substrate; a first conductive layer that is provided above the substrate and includes a torsion hinge and at least a pair of first support posts protruded toward the substrate from the torsion hinge; a second conductive layer that is provided above the first conductive layer and includes a flat plate and a second support post having a concave portion protruded toward the first conductive layer from the flat plate, an inner side of the concave portion being filled by a resin; and a reflective layer provided above the resin and the flat plate.