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发明名称
摘要
申请公布号
JPS5911176(B2)
申请公布日期
1984.03.14
申请号
JP19800003471
申请日期
1980.01.18
申请人
HITACHI LTD
发明人
YABE MINORU;NODA KENICHI;ENDO SATORU;YAMAUCHI MASAAKI
分类号
H01J9/14;H01J29/50;H01J29/62
主分类号
H01J9/14
代理机构
代理人
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地址
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